Single-crystal silicon is bonded to a metal-coated substrate and etched in order to form an array of microcylinder passive terahertz dielectric resonator antennas (DRAs). The DRAs exhibit a magnetic response, and hence the array behaves as an efficient artificial magnetic conductor (AMC), with potential for terahertz antenna and sensing applications.
Keywords: artificial magnetic conductors; dielectric resonator antennas; dielectrics; reactive ion etching; terahertz devices.
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