A simple compact temperature sensor and microheater in a wide temperature range has been developed, realizing a laser-patterned resistive structure on the surface of a synthetic polycrystalline diamond plate. Imaging and spectroscopy techniques used to investigate morphology, structure, and composition of the pattern showed that it incorporates different nondiamond carbon phases. Transport experiments revealed the semiconducting behavior of this microresistor. Thermal power measurements versus temperature are presented. A possible application of this device that may easily match compact experimental layouts avoiding both thermal anchoring offset and mechanical stress between sample and sensor is discussed. The patterned structure undergoes testing as a microthermometer, providing fast response and excellent stability versus time. It exhibits a good sensitivity that coupled to an easy calibration procedure minimizes errors and guarantees high accuracy. Plot of temperature versus input power of the resistive patterned line used as microheater shows a linear behavior in an extended temperature range.
Keywords: CVD diamond; graphitic planar structure; laser patterning; microheater; microthermometer.