The development of love wave-based humidity sensors incorporating multiple layers

Lijun Wang; Jiansheng Liu; Shitang He

doi:10.3390/s150408615

The development of love wave-based humidity sensors incorporating multiple layers

Sensors (Basel). 2015 Apr 14;15(4):8615-23. doi: 10.3390/s150408615.

Authors

Lijun Wang¹, Jiansheng Liu², Shitang He³

Affiliations

¹ Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China. wanglijun12@mails.ucas.ac.cn.
² Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China. liujs98@hotmail.com.
³ Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China. heshitang@mail.ioa.ac.cn.

Abstract

A Love wave humidity sensor is developed by using a multilayer structure consisting of PVA/SiO2 layers on an ST-90°X quartz substrate. The theoretical result shows that the sensor with such a two-layer structure can achieve a higher sensitivity and a smaller loss than the structures with a single polymer layer. Comparative experiments are performed for the sensor incorporating PVA/SiO2 layers and the sensor incorporating a PVA layer. The experimental results agree well with the theoretical predication.