We propose a one-step nanopatterning method where liquid monomers are polymerized directly with an electron beam under an atmospheric pressure. The method allows precise positional control of an electron beam that induces electropolymerization based on an anodic oxidation only in the irradiated areas. Various versatile conjugated polymers, including polypyrrole, polyaniline and poly(3-hexylthiophene), have been directly polymerized from monomers without solvents and patterned by our one-step nanopatterning method. Vertically oriented arrays of nanorods several hundred nanometers in diameter with an aspect ratio (height to diameter) of around two were fabricated.
Keywords: atmospheric scanning electron microscopy; conjugated polymer; electropolymerization; nanopatterning.
© The Author 2015. Published by Oxford University Press on behalf of The Japanese Society of Microscopy.