Five- and six-membered cyclic silylated onium ions of group 15 elements I were synthesized by intramolecular cyclization of transient silylium ions II. Silylium ions II were prepared by the hydride transfer reaction from silanes III using trityl cation as hydride acceptor. It was found that smaller ring systems could not be obtained by this approach. In these cases tritylphosphonium ions IV were isolated instead. Cations I and IV were isolated in the form of their tetrakispentafluorphenyl borates and characterized by multinuclear NMR spectroscopy and, in two cases, by X-ray diffraction analysis. Cyclic onium ions I showed no reactivity similar to that of isoelectronic intramolecular borane/phosphane frustrated Lewis pairs (FLPs). The results of DFT computations at the M05-2X level suggest that the strength of the newly formed Si-E linkage is the major reason for inertness of I[B(C6F5)4] versus molecular hydrogen.