The analysis to SF6 decomposed component gases is an efficient diagnostic approach to detect the partial discharge in gas-insulated switchgear (GIS) for the purpose of accessing the operating state of power equipment. This paper applied the Au-doped TiO2 nanotube array sensor (Au-TiO2 NTAs) to detect SF6 decomposed components. The electrochemical constant potential method was adopted in the Au-TiO2 NTAs' fabrication, and a series of experiments were conducted to test the characteristic SF6 decomposed gases for a thorough investigation of sensing performances. The sensing characteristic curves of intrinsic and Au-doped TiO2 NTAs were compared to study the mechanism of the gas sensing response. The results indicated that the doped Au could change the TiO2 nanotube arrays' performances of gas sensing selectivity in SF6 decomposed components, as well as reducing the working temperature of TiO2 NTAs.