A New Fully Differential CMOS Capacitance to Digital Converter for Lab-on-Chip Applications

IEEE Trans Biomed Circuits Syst. 2015 Jun;9(3):353-61. doi: 10.1109/TBCAS.2014.2336596. Epub 2014 Aug 11.

Abstract

In this paper, we present a new differential CMOS capacitive sensor for Lab-on-Chip applications. The proposed integrated sensor features a DC-input ΣΔ capacitance to digital converter (CDC) and two reference and sensing microelectrodes integrated on the top most metal layer in 0.35 μm CMOS process. Herein, we describe a readout circuitry with a programmable clocking strategy using a Charge Based Capacitance Measurement technique. The simulation and experimental results demonstrate a high capacitive dynamic range of 100 fF-110 fF, the sensitivity of 350 mV/fF and the minimum detectable capacitance variation of as low as 10 aF. We also demonstrate and discuss the use of this device for environmental applications through various chemical solvents.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Biosensing Techniques / instrumentation*
  • Electric Capacitance
  • Equipment Design
  • Lab-On-A-Chip Devices
  • Semiconductors