Electron energy distribution function by using probe method in electron cyclotron resonance multicharged ion source

Sho Kumakura; Yosuke Kurisu; Daiju Kimura; Keisuke Yano; Youta Imai; Fuminobu Sato; Yushi Kato; Toshiyuki Iida

doi:10.1063/1.4829738

Electron energy distribution function by using probe method in electron cyclotron resonance multicharged ion source

Rev Sci Instrum. 2014 Feb;85(2):02A925. doi: 10.1063/1.4829738.

Authors

Sho Kumakura¹, Yosuke Kurisu¹, Daiju Kimura¹, Keisuke Yano¹, Youta Imai¹, Fuminobu Sato¹, Yushi Kato¹, Toshiyuki Iida¹

Affiliation

¹ Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, Osaka, Japan.

PMID: 24593504
DOI: 10.1063/1.4829738

Abstract

We are constructing a tandem type electron cyclotron resonance (ECR) ion source (ECRIS). High-energy electrons in ECRIS plasma affect electron energy distribution and generate multicharged ion. In this study, we measure electron energy distribution function (EEDF) of low energy region (≦100 eV) in ECRIS plasma at extremely low pressures (10(-3)-10(-5) Pa) by using cylindrical Langmuir probe. From the result, it is found that the EEDF correlates with the electron density and the temperature from the conventional probe analysis. In addition, we confirm that the tail of EEDF spreads to high energy region as the pressure rises and that there are electrons with high energy in ECR multicharged ion source plasma. The effective temperature estimated from the experimentally obtained EEDF is larger than the electron temperature obtained from the conventional method.

MeSH terms

Cyclotrons*
Electrons*
Pressure