On the role of electron energy distribution function in double frequency heating of electron cyclotron resonance ion source plasmas

Rev Sci Instrum. 2014 Feb;85(2):02A919. doi: 10.1063/1.4828708.

Abstract

Double frequency heating (DFH) is a tool to improve the output of highly charged ions particularly from modern electron cyclotron resonance ion source installations with very high RF-frequencies. In order to gain information on the DFH-mechanism and on the role of the lower injected frequency we have carried out a series of dedicated experiments where we have put emphasis on the creation of a discrete resonance surface also for this lower frequency. Our well-established method of inserting an emissive MD (metal-dielectric) liner into the plasma chamber of the source is used in these experiments as a tool of investigation. In this way, the electron temperature and density for both ECR zones is increased in a controlled manner, allowing conclusions on the role of the change of the electron-energy-distribution function with and without DFH.