The study of piezoelectric lateral-electric-field-excited resonator

IEEE Trans Ultrason Ferroelectr Freq Control. 2014 Jan;61(1):166-72. doi: 10.1109/TUFFC.2014.6689784.

Abstract

The piezoelectric lateral-electric-field-excited resonator based on an X-cut lithium niobate plate has been investigated. Two rectangular electrodes were applied on one side of the plate so that the lateral electric field components were parallel to the crystallographic Y-axis and excited the longitudinal wave in the gap between the electrodes. The region around the electrodes was covered with a special absorbing varnish to suppress the spurious oscillations. The effect of the absorbing coating width on the resonant frequency and Q-factor of the lateral field-excited resonator was studied in detail with the series and parallel resonances for different width of the gap between the electrodes. As a result, we found experimentally the parameter regions of pure resonances and the boundaries of value variation for resonance frequency, Q-factor, and effective electromechanical coupling coefficient.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Acoustics / instrumentation*
  • Computer Simulation
  • Computer-Aided Design*
  • Electrodes*
  • Electromagnetic Fields
  • Micro-Electrical-Mechanical Systems / instrumentation*
  • Models, Theoretical*
  • Sound