Protection effect of ZrO2 coating layer on LiCoO2 thin film fabricated by DC magnetron sputtering

J Nanosci Nanotechnol. 2013 Oct;13(10):7152-4. doi: 10.1166/jnn.2013.7806.

Abstract

Bare and ZrO2-coated LiCoO2 thin films were fabricated by direct current magnetron sputtering method on STS304 substrates. Deposited both films have a well-crystallized structure with (003) preferred orientation after annealing at 600 degrees C. The ZrO2-coated LiCoO2 thin film provide significantly improved cycling stability compared to bare LiCoO2 thin film at high cut-off potential (3.0-4.5 V). The improvement in electrochemical stability is attributed to the structural stability by ZrO2 coating layer.