A highly sensitive refractometric sensor based on cascaded SiN microring resonators

Sensors (Basel). 2013 Oct 28;13(11):14601-10. doi: 10.3390/s131114601.

Abstract

We investigate a highly sensitive optical sensor based on two cascaded microring resonators exploiting the Vernier effect. The architecture consists of two microrings with a slight difference in their free spectral ranges. This allows the generation of the Vernier effect for achieving ultra-high sensitivities. The sensor chip was fabricated using a silicon nitride platform and characterized with isopropanol/ethanol mixtures. A sensitivity of 0.95 nm/% was found for isopropanol concentrations in ethanol ranging from 0% to 10%. Furthermore, a collection of measurements was carried out using aqueous sodium chloride (NaCl) in solutions of different concentrations, confirming a high sensitivity of 10.3 nm/% and a bulk refractive index sensitivity of 6,317 nm/RIU. A limit of detection of 3.16 × 10(-6) RIU was determined. These preliminary results show the potential features of cascaded silicon nitride microring resonators for real-time and free-label monitoring of biomolecules for a broad range of applications.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • 2-Propanol / chemistry
  • Ethanol / chemistry
  • Limit of Detection
  • Refractometry / instrumentation*
  • Refractometry / methods
  • Silicon Compounds / chemistry*
  • Sodium Chloride

Substances

  • Silicon Compounds
  • Ethanol
  • Sodium Chloride
  • 2-Propanol
  • silicon nitride