Pulsed-laser deposited transition-metal carbides for field-emission cathode coatings

ACS Appl Mater Interfaces. 2013 Sep 25;5(18):9241-6. doi: 10.1021/am403362w. Epub 2013 Sep 16.

Abstract

Thin films of transition-metal carbides ZrC, HfC, and TiC were deposited by pulsed-laser deposition under vacuum. The surface chemistry of the films was characterized with ultraviolet photoelectron spectroscopy, X-ray photoelectron spectroscopy, and Auger electron spectroscopy in situ. X-ray diffraction was used to characterize the film structure. TiC was shown to be nearly stoichiometric and polycrystalline. The TiC was applied to a vertically aligned carbon nanotube sample and characterized by field emission. Field-emission results showed enhanced current and current density at a film thickness, 5 nm, not previously reported in the literature. Emission from TiC films was also shown to be less affected by adsorbates during field emission. Pulsed-laser deposition of TiC offers a distinct advantage over other techniques in that high-quality films can be obtained under ultrahigh vacuum conditions without the use of a reactive background gas or excessively high annealing temperatures. The application of TiC by pulsed-laser deposition as a cathode coating shows potential for integration into a fabrication process.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.