Sub-micrometer soft lithography of a bulk chalcogenide glass

Opt Express. 2013 Apr 22;21(8):9584-91. doi: 10.1364/OE.21.009584.

Abstract

We demonstrate, for the first time, time- and cost-effective replication of sub-micrometer features from a soft PDMS mold onto a bulk chalcogenide glass over a large surface area. A periodic array of sub-micrometer lines (diffraction grating) with period 625 nm, amplitude 45 nm and surface roughness 3 nm was imprinted onto the surface of the chalcogenide AsSe(2) bulk glass at temperature 225°C, i.e. 5°C below the softening point of the glass. Sub-micrometer soft lithography into chalcogenide bulk glasses shows good reliability, reproducibility and promise for feasible fabrication of various dispersive optical elements, anti-reflection surfaces, 2D photonic structures and nano-structured surfaces for enhanced photonic properties and chemical sensing.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Chalcogens / chemistry*
  • Chalcogens / radiation effects
  • Glass / chemistry*
  • Light
  • Materials Testing
  • Molecular Imprinting / methods*
  • Nanoparticles / chemistry*
  • Nanoparticles / radiation effects
  • Nanoparticles / ultrastructure*
  • Particle Size
  • Surface Properties / radiation effects

Substances

  • Chalcogens