We present a CMOS-compatible athermal tunable silicon optical lattice filter composed of 10 cascaded 2 × 2 asymmetric Mach-Zehnder interferometers. Active tuning experiments show that the filter central wavelength can be red-/blue-shifted by 13.1/21.3 nm with power consumption of 77/96 mW on top/bottom arms. Temperature shift measurements show that the thermal-sensitivity of the filter central wavelength before active tuning is as low as -1.465 pm/°C. The thermal-sensitivity is varied within 26.5 pm/°C to -27.1 pm/°C when the filter central wavelength is tuned in the wavelength range of 1534 nm to 1551 nm. We use the transfer matrix method to theoretically model the lattice filter and its thermal-sensitivity before and after tuning is analyzed and discussed.