Graphene MEMS: AFM probe performance improvement

ACS Nano. 2013 May 28;7(5):4164-70. doi: 10.1021/nn400557b. Epub 2013 Apr 12.

Abstract

We explore the feasibility of growing a continuous layer of graphene in prepatterned substrates, like an engineered silicon wafer, and we apply this as a mold for the fabrication of AFM probes. This fabrication method proves the fabrication of SU-8 devices coated with graphene in a full-wafer parallel technology and with high yield. It also demonstrates that graphene coating enhances the functionality of SU-8 probes, turning them conductive and more resistant to wear. Furthermore, it opens new experimental possibilities such as studying graphene-graphene interaction at the nanoscale with the precision of an AFM or the exploration of properties in nonplanar graphene layers.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Electrical Equipment and Supplies*
  • Graphite / chemistry*
  • Mechanical Phenomena*
  • Microscopy, Atomic Force / instrumentation
  • Microscopy, Atomic Force / methods*
  • Microtechnology / instrumentation
  • Microtechnology / methods*
  • Polymers / chemistry

Substances

  • Polymers
  • Graphite