Solution-based adaptive parallel patterning by laser-induced local plasmonic surface defunctionalization

Opt Express. 2012 Dec 17;20(27):29111-20. doi: 10.1364/OE.20.029111.

Abstract

Adaptive mass fabrication method based on laser-induced plasmonic local surface defunctionalization was suggested to realize solution-based high resolution self-patterning on transparent substrate in parallel. After non-patterned functional monolayer was locally deactivated by laser-induced metallic plasma species, various micro/nano metal structures could be simultaneously fabricated by the parallel self-selective deposition of metal nanoparticles on a specific region. This method makes the eco-friendly and cost-effective production of high resolution pattern possible. Moreover, it can respond to design change actively due to the broad controllable range and easy change of key patterning specifications such as a resolution (subwavelength~100 μm), thickness (100 nm~6 μm), type (dot and line), and shape.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Lasers*
  • Manufactured Materials / radiation effects*
  • Materials Testing
  • Surface Plasmon Resonance / methods*
  • Surface Properties / radiation effects