Improving CMOS-compatible Germanium photodetectors

Opt Express. 2012 Nov 19;20(24):26345-50. doi: 10.1364/OE.20.026345.

Abstract

We report design improvements for evanescently coupled Germanium photodetectors grown at low temperature. The resulting photodetectors with 10 μm Ge length manufactured in a commercial CMOS process achieve >0.8 A/W responsivity over the entire C-band, with a device capacitance of <7 fF based on measured data.

Publication types

  • Comparative Study
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Amplifiers, Electronic*
  • Computer-Aided Design
  • Equipment Design
  • Germanium / chemistry*
  • Humans
  • Light*
  • Optical Devices*
  • Semiconductors*
  • Surface Plasmon Resonance / instrumentation*

Substances

  • Germanium