In this study, we report the applicability of two different Optical Coherence Tomography (OCT) technologies for inspecting Light Emitting Diode (LED) structures. Sectional images of a LED were captured using a Spectral Domain OCT (SD-OCT) system and a Swept Source OCT (SS-OCT) system. Their center wavelengths are 850 and 1,310 nm, respectively. We acquired cross-sectional two dimensional (2D) images of a normal LED and extracted sectional profiles to inspect possible wire disconnection that may be present in the LED manufacturing process. The SD-OCT and SS-OCT images were compared with each other in the same sample to study their advantages. The distribution of fluorescence material was observed more clearly with the SD-OCT of 850 nm wavelength, whereas the status of wire connection was clearer in the SS-OCT images with 1,310 nm wavelength. In addition, the volume of the fluorophore space was calculated from the OCT images. This is the first report that a nondestructive optical imaging modality such as OCT can be applied to finding screen defects in LED. We expect this method can improve the inspection efficacy over traditional inspection methods such as Charged Coupled Device (CCD) camera or X-ray instruments.
Keywords: LED; OCT; inspection; non-destructive; real-time.