Plasma-enabled graded nanotube biosensing arrays on a Si nanodevice platform: catalyst-free integration and in situ detection of nucleation events

Abstract

Low-temperature plasmas in direct contact with arbitrary, written linear features on a Si wafer enable catalyst-free integration of carbon nanotubes into a Si-based nanodevice platform and in situ resolution of individual nucleation events. The graded nanotube arrays show reliable, reproducible, and competitive performance in electron field emission and biosensing nanodevices.