Electrochemical X-ray photolithography
Angew Chem Int Ed Engl
.
2012 Nov 12;51(46):11602-5.
doi: 10.1002/anie.201204801.
Epub 2012 Oct 12.
Authors
Andrei A Eliseev
1
,
Nina A Sapoletova
,
Irina Snigireva
,
Anatoly Snigirev
,
Kirill S Napolskii
Affiliation
1
Department of Materials Science, Lomonosov Moscow State University, Moscow, 119991, Russia. eliseev@inorg.chem.msu.ru
PMID:
23059831
DOI:
10.1002/anie.201204801
No abstract available