Hierarchical three-dimensional layer-by-layer assembly of carbon nanotube wafers for integrated nanoelectronic devices

Nano Lett. 2012 Sep 12;12(9):4540-5. doi: 10.1021/nl3016472. Epub 2012 Aug 17.

Abstract

We report a general approach to overcome the enormous obstacle of the integration of CNTs into devices by bonding single-walled carbon nanotubes (SWNTs) films to arbitrary substrates and transferring them into densified and lithographically processable "CNT wafers". Our approach allows hierarchical layer-by-layer assembly of SWNTs into organized three-dimensional structures, for example, bidirectional islands, crossbar arrays with and without contacts on Si, and flexible substrates. These organized SWNT structures can be integrated with low-power resistive random-access memory.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Crystallization / methods*
  • Electronics / instrumentation*
  • Equipment Design
  • Equipment Failure Analysis
  • Materials Testing
  • Nanotechnology / instrumentation*
  • Nanotubes, Carbon / chemistry*
  • Nanotubes, Carbon / ultrastructure*
  • Particle Size
  • Systems Integration

Substances

  • Nanotubes, Carbon