A problem demanding to be solved in the development of microelectromechanical system (MEMS) IR source array has been the driving circuit and system. A method that can achieve the requirements of high driving power, high output efficiency, high voltage precision, voltage compensation, and deep frequency modulation for driving and modulating a MEMS IR source array was proposed. A liner DC steady voltage integrated circuit ADP3336 is used to drive the source array directly with a programmable compensation module ensuring the precision of radiation peak wavelength. And a FPGA as the control core of the system modulates the frequency and width of the driving pulse to control the array coding pattern. The engineering value of the system would be increased with the application of the MEMS IR source.