This study presents the deflection, resonant frequency and stress results of rectangular, triangular, and step profile microcantilevers subject to surface stress. These cantilevers can be used as the sensing element in microcantilever biosensors. To increase the overall sensitivity of microcantilever biosensors, both the deflection and the resonant frequency of the cantilever should be increased. The effect of the cantilever profile change and the cantilever cross-section shape change is first investigated separately and then together. A finite element code ANSYS Multiphysics is used and solid finite elements cantilever models are solved. A surface stress of 0.05 N/m was applied to the top surface of the cantilevers. The cantilevers are made of silicon with elastic modulus 130 GPa and Poisson's ratio 0.28. To show the conformity of this study, the numerical results are compared against their analytical ones. Results show that triangular and step cantilevers have better deflection and frequency characteristics than rectangular ones.
Keywords: biosensor; deflection; microcantilever; resonant frequency; surface stress.