Indium-rich InGaN epitaxial layers grown pseudomorphically on a nano-sculpted InGaN template

Opt Express. 2012 Mar 26;20(7):8093-9. doi: 10.1364/OE.20.008093.

Abstract

Indium-rich InGaN epitaxial layers with a p-i-n structure were grown pseudomorphically on a strain-relaxed InGaN template to reduce structural strain induced by lattice mismatch. We applied a nano-sculpting process to improve the crystal quality of the strain-relaxed InGaN template. The results show that the nano-sculpting process can suppress effectively the threading dislocation generation and improves significantly the I-V characteristic of the InGaN p-i-n structure. This InGaN template technique with nano-sculpting process shows great potential for future applications in indium-rich InGaN optic-electron devices.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Crystallization / methods*
  • Gallium / chemistry*
  • Indium / chemistry*
  • Materials Testing
  • Molecular Imprinting / methods*
  • Nanotechnology / methods*
  • Semiconductors*

Substances

  • Indium
  • gallium nitride
  • Gallium
  • indium nitride