The second generation Singapore high resolution proton beam writing facility

J A van Kan; P Malar; Armin Baysic de Vera

doi:10.1063/1.3662205

The second generation Singapore high resolution proton beam writing facility

Rev Sci Instrum. 2012 Feb;83(2):02B902. doi: 10.1063/1.3662205.

Authors

J A van Kan¹, P Malar, Armin Baysic de Vera

Affiliation

¹ Centre for Ion Beam Applications, Department of Physics, National University of Singapore, Singapore 117542, Singapore. phyjavk@nus.edu.sg

PMID: 22380334
DOI: 10.1063/1.3662205

Abstract

A new proton beam focusing facility, designed for proton beam writing (PBW) applications has been tested. PBW allows for proximity free structuring of high aspect ratio, high-density 3D nanostructures. The new facility is designed around OM52 compact quadrupole lenses capable of operating in a variety of high demagnification configurations. Performance tests show that proton beams can be focused down to 19.0 × 29.9 nm(2) and single line scans show a beam width of 12.6 nm. The ultimate goal of sub 10 nm structuring with MeV protons will be discussed.