Integrated TiO2 resonators for visible photonics

Opt Lett. 2012 Feb 15;37(4):539-41. doi: 10.1364/OL.37.000539.

Abstract

We demonstrate waveguide-coupled titanium dioxide (TiO(2) racetrack resonators with loaded quality factors of 2.2×10(4) for the visible wavelengths. The structures were fabricated in sputtered TiO(2) thin films on oxidized silicon substrates using standard top-down nanofabrication techniques, and passively probed in transmission measurements using a tunable red laser.