Organometallic chemical vapor deposition of III/V compound semiconductors with novel organometallic precursors
J Am Chem Soc
.
1988 Aug 1;110(18):6248-9.
doi: 10.1021/ja00226a051.
Authors
A H Cowley
,
B L Benac
,
J G Ekerdt
,
R A Jones
,
K B Kidd
,
J Y Lee
,
J E Miller
PMID:
22148811
DOI:
10.1021/ja00226a051
No abstract available