An ultralow coupling loss and broad bandwidth fiber-to-waveguide mode-size converter is demonstrated for nano-scale waveguides on SOI platform using CMOS technology in this paper. The mode-size converter consists of a cantilevered PECVD SiO(2) waveguide and a-Si nano-tapers by removing the adjacent SiO(2) layer and underlying substrate Si. The a-Si waveguide is located at the center of the cantilevered SiO(2) waveguide. We characterized the cantilevered mode-size converter using cleaved optical single mode fiber with 10.5 µm mode field diameter. With refractive index (1.375) matching oil, the measured coupling efficiencies between the cleaved optical fiber and this converter are higher than 80% per facet and 70% per facet for TE and TM modes at 1600 nm, respectively. The polarization dependent loss and the coupling loss variation of this converter are less than 1.0 dB at the wavelength range of 1520~1640 nm. The 1-dB bandwidths for both TE and TM modes are more than 120 nm. The alignment tolerances for TE and TM modes are ± 2.8 µm and ± 2.1 µm at 1-dB excess loss in horizontal direction and vertical direction, respectively.
© 2011 Optical Society of America