Preparation of wide range refractive index diamond-like carbon films by means of plasma-enhanced chemical vapor deposition

A Gharibyan; D Hayrapetyan; Zh Panosyan; Ye Yengibaryan

doi:10.1364/AO.50.000G69

Preparation of wide range refractive index diamond-like carbon films by means of plasma-enhanced chemical vapor deposition

Appl Opt. 2011 Nov 1;50(31):G69-73. doi: 10.1364/AO.50.000G69.

Authors

A Gharibyan¹, D Hayrapetyan, Zh Panosyan, Ye Yengibaryan

Affiliation

¹ Heliotechnic Laboratory, State Engineering University of Armenia, 105 Teryan Street, Yerevan 0009, Armenia. gharibyan87@gmail.com

PMID: 22086050
DOI: 10.1364/AO.50.000G69

Abstract

Plasma-enhanced chemical vapor deposition technology has been elaborated for obtaining diamond-like carbon (DLC) coatings of a wide range of properties. Alternative and direct bias voltages have been applied on the substrate, and refractive index dependencies upon various deposition technological parameters have been investigated. The frequency of the bias voltage has been varied in the region of 150-450 kHz. The maximum refractive index range that has been achieved is 1.46-3.2. Thin DLC films have been prepared on crystalline silicon substrates. Because of the wide range of physical, optical, and mechanical properties of the obtained films, they can successfully be applied in different fields of nano-optics.