Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing

Adv Mater. 2011 Oct 4;23(37):4285-9. doi: 10.1002/adma.201102331.
No abstract available

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Adhesives / chemistry*
  • Electrodes
  • Hot Temperature
  • Nanotubes, Carbon / chemistry*
  • Silicon / chemistry*

Substances

  • Adhesives
  • Nanotubes, Carbon
  • Silicon