Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing
Adv Mater
.
2011 Oct 4;23(37):4285-9.
doi: 10.1002/adma.201102331.
Authors
Youngkee Eun
1
,
Jae-Ik Lee
,
Jungwook Choi
,
Youngsup Song
,
Jongbaeg Kim
Affiliation
1
School of Mechanical Engineering, Yonsei University, Seoul, Republic of Korea.
PMID:
22039598
DOI:
10.1002/adma.201102331
No abstract available
Publication types
Research Support, Non-U.S. Gov't
MeSH terms
Adhesives / chemistry*
Electrodes
Hot Temperature
Nanotubes, Carbon / chemistry*
Silicon / chemistry*
Substances
Adhesives
Nanotubes, Carbon
Silicon