Profiling of barrier capacitance and spreading resistance using a transient linearly increasing voltage technique

E Gaubas; T Ceponis; J Kusakovskij

doi:10.1063/1.3626796

Profiling of barrier capacitance and spreading resistance using a transient linearly increasing voltage technique

Rev Sci Instrum. 2011 Aug;82(8):083304. doi: 10.1063/1.3626796.

Authors

E Gaubas¹, T Ceponis, J Kusakovskij

Affiliation

¹ Vilnius University, Institute of Applied Research, Vilnius, Lithuania. eugenijus.gaubas@ff.vu.lt

PMID: 21895240
DOI: 10.1063/1.3626796

Abstract

A technique for the combined measurement of barrier capacitance and spreading resistance profiles using a linearly increasing voltage pulse is presented. The technique is based on the measurement and analysis of current transients, due to the barrier and diffusion capacitance, and the spreading resistance, between a needle probe and sample. To control the impact of deep traps in the barrier capacitance, a steady state bias illumination with infrared light was employed. Measurements of the spreading resistance and barrier capacitance profiles using a stepwise positioned probe on cross sectioned silicon pin diodes and pnp structures are presented.