Improved optical and electrical characteristics of free-standing GaN substrates by chemical polishing utilizing photo-electrochemical method

J Nanosci Nanotechnol. 2011 Apr;11(4):2882-5. doi: 10.1166/jnn.2011.3918.

Abstract

The optical and electrical properties of GaN(0001) surfaces treated by a novel chemical polishing method are described. Scanning microscopic photoluminescence images reveal that the polished GaN surface shows improved luminescence properties compared to the untreated surface. Current-voltage measurements of Schottky barriers formed using the GaN substrates show that the polished GaN surface has a lower reverse leakage current, and that the barrier height and ideality factor are improved after the polishing treatment.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Electric Conductivity
  • Equipment Design
  • Equipment Failure Analysis
  • Gallium / chemistry*
  • Lenses*
  • Luminescent Measurements / instrumentation*
  • Materials Testing
  • Nanostructures / chemistry*
  • Nanostructures / ultrastructure*
  • Semiconductors*
  • Surface Properties

Substances

  • gallium nitride
  • Gallium