Fabrication of split-ring resonators by tilted nanoimprint lithography

Liguo Gao; Li Lin; Juanyuan Hao; Weifeng Wang; Renping Ma; Hongbo Xu; Jingsheng Yu; Nan Lu; Wenchong Wang; Lifeng Chi

doi:10.1016/j.jcis.2011.04.086

Fabrication of split-ring resonators by tilted nanoimprint lithography

J Colloid Interface Sci. 2011 Aug 1;360(1):320-3. doi: 10.1016/j.jcis.2011.04.086. Epub 2011 Apr 29.

Authors

Liguo Gao¹, Li Lin, Juanyuan Hao, Weifeng Wang, Renping Ma, Hongbo Xu, Jingsheng Yu, Nan Lu, Wenchong Wang, Lifeng Chi

Affiliation

¹ State Key Laboratory of Supramolecular Structure and Materials, College of Chemistry, Jilin University, Changchun, PR China.

PMID: 21592486
DOI: 10.1016/j.jcis.2011.04.086

Abstract

An efficient fabrication technique for large area periodic metallic split-ring arrays has been demonstrated by the combination of tilted nanoimprint lithography and nanotransfer imprinting. The feature size of the split-rings can be adjusted by varying the key geometry parameters of the original imprinting mold. Due to the flexible nature of PDMS molds, these arrays can be patterned on curved surfaces. The molds for nanoimprint lithography and nanotransfer imprinting can be used multiple times without a loss of fidelity.