Emerging evidence of the striking differences that can be induced in the behavior of biological cells through topographical modulation of physically and chemically patterned nanostructured surfaces provides a great impetus for developing novel cellular-scale and sub-cellular-scale nanopatterned substrates and for employing them for exciting new applications in life and medical sciences and biotechnology. However, the lack of availability of cost-effective, large-surface-area nanofabricated substrates of appropriate dimensions and features has proved to be a major impediment for research in this area. Here, we demonstrate a simple and cost-effective method based on interference lithography to produce spatially precise and wide-surface-coverage silicon- and polymer-based nanostructures to study how cells react to nanoscale structures or surfaces.