Micromechanically tuned ring resonator in silicon on insulator

Lasse J Kauppinen; Shahina M C Abdulla; Meindert Dijkstra; Meint J de Boer; Erwin Berenschot; Gijs J M Krijnen; Markus Pollnau; René M de Ridder

doi:10.1364/OL.36.001047

Micromechanically tuned ring resonator in silicon on insulator

Opt Lett. 2011 Apr 1;36(7):1047-9. doi: 10.1364/OL.36.001047.

Authors

Lasse J Kauppinen¹, Shahina M C Abdulla, Meindert Dijkstra, Meint J de Boer, Erwin Berenschot, Gijs J M Krijnen, Markus Pollnau, René M de Ridder

Affiliation

¹ Integrated Optical Microsystems, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands.

PMID: 21478978
DOI: 10.1364/OL.36.001047

Abstract

We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.