Continuous measurement of atomic force microscope tip wear by contact resonance force microscopy
Small
.
2011 Apr 18;7(8):1018-22.
doi: 10.1002/smll.201002116.
Epub 2011 Mar 15.
Authors
Jason P Killgore
1
,
Roy H Geiss
,
Donna C Hurley
Affiliation
1
Materials Reliability Division, National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305, USA. jason.killgore@nist.gov
PMID:
21404440
DOI:
10.1002/smll.201002116
No abstract available
MeSH terms
Microscopy, Atomic Force / instrumentation*
Microscopy, Atomic Force / methods*
Silicon / chemistry
Substances
Silicon