A laser-activated MEMS transducer for efficient generation of narrowband longitudinal ultrasonic waves

IEEE Trans Ultrason Ferroelectr Freq Control. 2011 Feb;58(2):470-6. doi: 10.1109/TUFFC.2011.1824.

Abstract

In this paper, we demonstrate an optically powered microelectromechanical system (MEMS) transducer. It was designed and fabricated using MEMS techniques, and can generate narrowband ultrasonic bulk waves from a broadband laser excitation pulse with high efficiency. The transducer is a two-mask-level MEMS device with a microdisk seated on a microstem. When a laser pulse is incident on the disk center, a resonant flapping motion of the disk is actuated because of the thermomechanical interaction between the absorbing and non-absorbing parts of the disk, coupling a narrowband longitudinal bulk wave propagating along the axis of the stem into the sample. Finite element (FE) methods were used to simulate the generated ultrasound; the results agree well with experimental measurements. Experiments with the fabricated transducers have shown that narrowband ultrasound with a high SNR/amplitude was generated successfully; compared with normal thermoelastic generation, ultrasound with at least 5 times higher amplitude can be achieved by an optimized MEMS transducer. The transducer is inexpensive, compact, and simple to use.

MeSH terms

  • Equipment Design
  • Finite Element Analysis
  • Micro-Electrical-Mechanical Systems / instrumentation*
  • Transducers*
  • Ultrasonics / methods*