In this paper, impedance measurement of electrolyte-insulator-semiconductor (EIS) structure with high spatial resolution was proposed to monitor cell adhesion. The light addressing ability of this work overcomes the geometrical restrict of cell culture on conventional impedance detection devices such as interdigitated electrode (IDE) and electric cell-substrate impedance sensing (ECIS). Instead of studying cells on predetermined sites of IDE and ECIS, cells cultured anywhere on EIS sensor surface can be addressed and selected as target cells. Principle and primary models for high resolution impedance detection were described and tested by experiments. The EIS sensor was investigated in terms of its intrinsic characteristics, like impedance behavior, voltage characteristic, frequency dependency and photovoltaic effect. Optimized working condition was studied for cell experiments. Cell adhesion under treatment of 0.1% Triton X-100 was monitored using rat kidney cells as the source. Results showed good sensitivity (10% change of impedance) and resolution (40 μm) for cell adhesion impedance detection and suggested this work should be suitable for monitoring cell impedance. Further improvements on sensitivity, spatial resolution were discussed as well as the further applications for single cell monitoring and cell adhesion imaging.
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