Facet-embedded thin-film III-V edge-emitting lasers integrated with SU-8 waveguides on silicon

Opt Lett. 2010 Oct 15;35(20):3474-6. doi: 10.1364/OL.35.003474.

Abstract

A thin-film InGaAs/GaAs edge-emitting single-quantum-well laser has been integrated with a tapered multimode SU-8 waveguide onto an Si substrate. The SU-8 waveguide is passively aligned to the laser using mask-based photolithography, mimicking electrical interconnection in Si complementary metal-oxide semiconductor, and overlaps one facet of the thin-film laser for coupling power from the laser to the waveguide. Injected threshold current densities of 260A/cm(2) are measured with the reduced reflectivity of the embedded laser facet while improving single mode coupling efficiency, which is theoretically simulated to be 77%.

Publication types

  • Letter
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Arsenicals / chemistry
  • Equipment Design
  • Gallium / chemistry
  • Indium / chemistry
  • Lasers*
  • Light
  • Optics and Photonics
  • Semiconductors
  • Silicon / chemistry*
  • Silicon Dioxide / chemistry

Substances

  • Arsenicals
  • Indium
  • gallium arsenide
  • Silicon Dioxide
  • Gallium
  • Silicon