Determination of the refractive index of a-Si(1-x)C(x):H thin films from infrared absorption spectra

Appl Opt. 1993 Mar 1;32(7):1173-5. doi: 10.1364/AO.32.001173.

Abstract

The index of refraction of a-Si(1-x)C(x):H thin films obtained by dc magnetron sputtering was determined by means of IR absorption measurements. Structural and compositional changes that take place by increasing x make the film a mixture of different species, giving an effective value of the refractive index.