Patterning of rutile TiO2 surface by ion beam lithography through full-solid masks

Nanotechnology. 2010 Jun 11;21(23):235301. doi: 10.1088/0957-4484/21/23/235301. Epub 2010 May 13.

Abstract

In this work we present and discuss the nanopatterning of rutile TiO(2) single crystal surfaces following their irradiation with energetic heavy ions through a stencil mask of Ni filled self-ordered porous anodic alumina. After etching in HF a corrugated surface morphology is obtained composed of parallel alternate furrows and ridges (or nanobars) 50 nm in diameter and with 100 nm pitch. In addition, isolated, but collapsed, TiO(2) nanorods are seen lying on the patterned surface. The stability of the nanopatterned surface under high temperatures treatments and crystalline properties are analyzed.

Publication types

  • Research Support, Non-U.S. Gov't