Using hydrofluoric acid, scanning electron microscope-assisted X-ray microanalysis, and energy-filtered transmission electron microscopy, we present the first definite proof of biomineralized silicon [(SiO(2))](n) in a ciliophoran protist, Maryna umbrellata, a common inhabitant of ephemeral pools. In the trophic specimen, the amorphic silicon (glass) granules are accumulated in the anterior half of the body. When entering the dormant stage, most glass granules are excreted to form the surface cover of the globular resting cyst. Most likely, the silicon granules are synthesized in vesicles of the Golgi apparatus. First, nanospheres with a size of 20-40 nm are formed in a fibrous matrix; they grow to be spongious complexes, eventually becoming amorphous glass granules with an average size of 819 nm x 630 nm. In the transmission electron microscope, the silicon granules show the characteristic fracture pattern of glass known from many other silicon-bearing organisms. A literature survey suggests that silicon is very rare in ciliates. The fine structure and genesis of silicon granules in M. umbrellata are very similar to those of other organisms, including vascular plants and animals, indicating a common mechanism. Light perception and protection against mechanical stress and predators might be functions of the silicon granules in M. umbrellata. The palaeontological significance of glass cysts in ciliates is also discussed.