Cavity ring-down ellipsometry

J Chem Phys. 2009 Sep 28;131(12):121101. doi: 10.1063/1.3236819.

Abstract

We demonstrate the enhancement of ellipsometric measurements by multiple reflections of a polarized light pulse on a highly reflective target surface, using an optical cavity. The principle is demonstrated by measuring the adsorbed amount of a molecular vapor (fenchone) onto the ring-cavity mirrors. A phase shift sensitivity of about 10(-2) degrees in a single laser pulse is achieved in 1 micros. Further improvements are discussed that should allow sensitivities of at least 10(-4) degrees , surpassing current commercial ellipsometers, but also surpassing their time resolution by several orders of magnitude, allowing the uses of sensitive ellipsometry to be expanded to include the study of fast surface phenomena with submicrosecond resolution.