Positrons have been used for material analysis not only because of their novel characteristics, such as an ability to detect open-volume type defects in materials, but also because interactions with solids differ from those of electrons in such processes as scattering and diffraction. Monoenergetic positron beams and microbeams were developed in the 1980s, and positron experiments have made progress in material analyses. In this article we review the fundamental technique of microbeam fabrication, especially using a magnetically-guided positron beam, its extension to various analytical methods, and expectations for future research.