Laser-machined piezoelectric cantilevers for mechanical energy harvesting

HyunUk Kim; Vishwas Bedekar; Rashed Adnan Islam; Woo-Ho Lee; Don Leo; Shashank Priya

doi:10.1109/TUFFC.881

Laser-machined piezoelectric cantilevers for mechanical energy harvesting

IEEE Trans Ultrason Ferroelectr Freq Control. 2008 Sep;55(9):1900-5. doi: 10.1109/TUFFC.881.

Authors

HyunUk Kim¹, Vishwas Bedekar, Rashed Adnan Islam, Woo-Ho Lee, Don Leo, Shashank Priya

Affiliation

¹ Materials Science and Engineering, University of Texas, Arlington, TX, USA.

PMID: 18986886
DOI: 10.1109/TUFFC.881

Abstract

In this study, we report results on a piezoelectric- material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8 m/s(2)). The device was found to generate continuous power of 1.13 microW at 870 Hz across a 288.5 kOmega load with a power density of 301.3 microW/cm(3).

Publication types

Research Support, Non-U.S. Gov't

MeSH terms

Acoustics / instrumentation*
Electric Power Supplies*
Energy Transfer*
Equipment Design / instrumentation
Equipment Design / methods*
Equipment Failure Analysis
Lasers*
Motion
Vibration