Epitaxial ternary nitride thin films prepared by a chemical solution method

J Am Chem Soc. 2008 Nov 19;130(46):15224-5. doi: 10.1021/ja803544c. Epub 2008 Oct 22.

Abstract

It is indispensable to use thin films for many technological applications. This is the first report of epitaxial growth of ternary nitride AMN2 films. Epitaxial tetragonal SrTiN2 films have been successfully prepared by a chemical solution approach, polymer-assisted deposition. The structural, electrical, and optical properties of the films are also investigated.