Fabrication and characterization of optimized corner-cut square microresonators

Opt Express. 2008 Oct 13;16(21):16516-22. doi: 10.1364/oe.16.016516.

Abstract

In this paper we report the fabrication and characterization of waveguide coupled square resonators with modified corners, in particular the corner-cut square resonator. We employ rigorous FDTD analysis to identify an optimal corner-cut length and compare this with our experimental findings. Two- and three dimensional FDTD analysis is also used to optimize the coupling gap and the width of the coupling waveguide. Fabrication of the square microresonators on silicon-on-insulators by conventional E-beam lithography and dry etching techniques will be discussed in detail. The characterization of these corner-cut square microresonators shows good performance and excellent agreement with the rigorous electromagnetic simulations.

MeSH terms

  • Computer Simulation
  • Computer-Aided Design*
  • Equipment Design
  • Equipment Failure Analysis
  • Lasers
  • Light
  • Models, Theoretical*
  • Optical Devices*
  • Scattering, Radiation
  • Transducers*