Thin calcium-phosphate coatings with thickness less than 2.7 m were prepared by radio-frequency magnetron sputtering technique on the surfaces of pure titanium, titanium alloy Ti6A14V and stainless ASTM 316. Results of scanning electron microscopy showed that all coatings were dense and poreless and did not have any visible defects or microcracks. Rutherford backscattering (RBS) revealed a prepared coating consisting only of calcium 33.6 (1.6 at%, phosphorous 16.5 (1.5 at%, and oxygen 48.6 (1.2 at%. The concentration of each above-mentioned element through the coating was almost constant. The physicomechanical properties of the prepared coatings were investigated using a nanoindentation technique. The values of nano-hardness and Young's modulus calculated on the basis of the obtained data were 10 GPa and 113 GPa, respectively. These values were higher than that of non-coated substrates, except titanium alloy due to the sputtering mechanism. It was found that the coating with a thickness less than 1.6 ?m possessed more adhesion strength than coatings with greater value of thickness. However, we suggest that all coatings have great cohesive resistance that does not depend on the coating thickness.