Disorder-recrystallization effects in low-energy beam-solid interactions

Phys Rev Lett. 2008 May 9;100(18):185502. doi: 10.1103/PhysRevLett.100.185502. Epub 2008 May 6.

Abstract

It is widely believed that high-kinetic-energy (>1 keV) recoils in crystalline Si result in the formation of amorphous regions, whereas low-kinetic-energy recoils lead directly to isolated point defects. Here we study the response of a Si crystal using dynamical density-functional calculations and show that recoils of much less than 1 keV result in highly disordered regions that persist for hundreds of femtoseconds. Therefore, beam-induced defect formation is controlled by recrystallization processes during dynamic annealing even following low-energy ion implantation.